[B-1] Ferroelectric Devices

2:30 PM - 2:45 PM JST(5:30 AM - 5:45 AM UTC)

[B-1-05] Enhanced Radiation Tolerance in HZO FeCAPs Using ZrN Interfacial Engineering and Microwave Annealing

〇Jung Ting Chang¹, Ching-Hsien Wang¹, Chun-Yi Kuo¹, Yung-Hsien Wu¹ (1. National Tsing Hua Univ. (Taiwan))