[B-2] 3D NAND Flash Memory

4:00 PM - 4:15 PM JST(7:00 AM - 7:15 AM UTC)

[B-2-02] Demonstration of Airgap-First Process for Replacement Metal Gate 3D-NAND

〇Sana Rachidi¹, Tathagata Paul¹, Jana Loyo¹, Daniel Montero Alvarez¹, Devin Verreck^1,2, Wei Zheng¹, Geert Van den bosch¹, Maarten Rosmeulen^1,2 (1. imec (Belgium), 2. KU Leuven (Belgium))