[B-4] Ferroelectric FET 1

11:45 AM - 12:00 PM JST(2:45 AM - 3:00 AM UTC)

[B-4-05] BEOL-Compatible AlScN/IGZO FeFET with Robust Non-Volatile Behaviors and Multi-Level Cell Capability

〇Ziqing Wang¹、Xi Zhou¹、Hongwei Hao²、Shulin Zhu¹、Dongdong Li²、Weipeng Xuan³、Liang Zhao¹ (1. Zhejiang Univ. (China)、2. Zhangjiang Lab. (China)、3. Hangzhou Dianzi Univ. (China))