Presentation Information
[B-5-02]Investigation of N2O Gas-Treated Interfacial Layer and ZrO2 Seed Layer on Ferroelectricity and Memory Window of UTB HZO FeFETs
Dong-Ru Hsieh1, Hsin-Yu Chen1, Li-Quan Yang1, Nai-Fang Hsu1, Yu Fu1, 〇Tien-Sheng Chao1 (1. National Yang Ming Chiao Tung University (NYCU) (Taiwan))
