Presentation Information
[B-6-04]Investigation of Self-Heating Effects in 4F2 Vertical DRAM
〇Jiwoong Choi1, Jinhong Lee1, Hojun Kim1, Yeongmyeong Cho1, Dong keun Lee1, Jangsaeng Kim1,2, Sihyun Kim1,2, Sangwan Kim1,2 (1. Department of Electronic Engineering, Sogang Univ. (Korea), 2. Inst. of Semiconductor Technologies, Sogang Univ. (Korea))