Presentation Information

[B-7-02]New insights into enhanced retention characteristics in cryogenic operation combined with defect annihilation annealing in MONOS cells

〇Viktoria Schlykow1, Yuta Aiba1, Hitomi Tanaka1, Hajime Sano1, Takanori Yamanaka1, Keiichi Sawa1, Masumi Saitoh1, Tomoya Sanuki1, Reika Ichihara1 (1. Kioxia Corp. (Japan))