Presentation Information
[B-8-03]Microstructure-Performance Evolution in Lanthanum-Doped Ferroelectric HZO MIM Capacitors by Precession Electron Diffraction
〇Sarah Lynch1, Hannah Margavio1, Sara Aoki1, Dina Triyoso1, Steve Consiglio1, Dave Hetzer1, Cory Wajda1, Gert Leusink1, Rinus Lee1 (1. Tokyo Electron America, Inc. (USA))
