[C-2] Qubit and Related Technology

4:15 PM - 4:30 PM JST(7:15 AM - 7:30 AM UTC)

[C-2-03] Strain Tensor Mapping of Si/SiGe Heterostructures for Spin-Qubit Applications by Scanning Diffraction X-Ray Microscopy

〇Momcilo Milosavljevic Milosavljevic^1,2, Yosuke Shimura², Cedric Corley-Wiciak³, Arne Loenders^1,2, Clement Godfrin², Oji Ugwumsinachi³, Steven Leake³, Tobias Schülli³, Roger Loo^2,4, Kristiaan de Greve^2,1 (1. KU Leuven (Belgium), 2. IMEC (Belgium), 3. ESRF (France), 4. Ghent Univ. (Belgium))