Presentation Information

[C-2-03]Strain Tensor Mapping of Si/SiGe Heterostructures for Spin-Qubit Applications by Scanning Diffraction X-Ray Microscopy

〇Momcilo Milosavljevic Milosavljevic1,2, Yosuke Shimura2, Cedric Corley-Wiciak3, Arne Loenders1,2, Clement Godfrin2, Oji Ugwumsinachi3, Steven Leake3, Tobias Schülli3, Roger Loo2,4, Kristiaan de Greve2,1 (1. KU Leuven (Belgium), 2. IMEC (Belgium), 3. ESRF (France), 4. Ghent Univ. (Belgium))

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