Presentation Information
[H-1-02]Performance Enhancement of Multistage Silicon Micro Thermoelectric Devices Using Nickel Silicide Interconnects
〇Kaichi Takayama1, Tatsuya Hayashi1, Yusuke Kozuka1,2, Makoto Kashiwagi1, Takayoshi Shimura1, Momoko Deura1, Takayoshi Katase3, Piotr Pokryszka4, Karolina Laszczyk4, Takanobu Watanbe1 (1. Waseda Univ. (Japan), 2. NIMS (Japan), 3. Inst. of Science Tokyo (Japan), 4. Wroclaw Univ. of Sci. and Tech. (Poland))
