[K-1] 3D Integration and Stress Optimization

1:45 PM - 2:00 PM JST(4:45 AM - 5:00 AM UTC)

[K-1-02] Investigation of Laser-Induced Crack Deflection in Through-Glass Vias

〇Wei Feng¹, Yusuke Takei¹, Takeshi Kobayashi¹ (1. Natl. Inst. Adv. Indus. Sci. & Tech. (Japan))