2026 International Conference on Solid State Devices and Materials
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Mon. Sep 14, 2026
Tue. Sep 15, 2026
Wed. Sep 16, 2026
Thu. Sep 17, 2026
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[PS-03-07 (Late News)]
Control of Crystallinity and Preferred Orientation of TiN Films
for Electrode Applications
〇Masaru Sato
1
, Mayumi B. Takeyama
1
(1. Kitami Inst. of Tech. (Japan))
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