[SO-PS-02] 02: Advanced and Emerging Memories / New Applications

1:34 PM - 1:36 PM JST(4:34 AM - 4:36 AM UTC)

[SO-PS-02-03] Nitrogen plasma engineering of TiN bottom electrodes for enhanced ferroelectric properties in TiN/Hf_0.5Zr_0.5O₂/TiN capacitors

Tung-Ming Pan^1,2, 〇Yung-En Cheng¹, Shih-Ting Chuang¹, Wei-Che Weng¹, Jim-Long Her¹ (1. Chang Gung University (Taiwan), 2. Chang Gung Memorial Hospital (Taiwan))