[SO-PS-02] 02: Advanced and Emerging Memories / New Applications

2:28 PM - 2:30 PM JST(5:28 AM - 5:30 AM UTC)

[SO-PS-02-30] Ferroelectric Al₂O₃-Embedded Hf_0.5Zr_0.5O₂ Channel-last Transistors with a 950℃ Thermal Budget for 3D NAND Application

〇Wenbo Fan¹, Xiaoyu Ke², Xiaolei Wang² (1. Univ. of Chinese Academy of Sciences (China), 2. Inst. of Microelectronics of the Chinese Academy of Sciences (China))