Presentation Information
[SO-PS-02-31]TiO2 Interlayer Engineering and Recovery Strategies for Enhancing
Cycling-induced Reliability in HfO2-Based Ferroelectric Capacitors
〇Fei Yu1,2, Yutai Man2, Wanmei Zhang2, Xingcheng Jin3, Chongyong Guo3, Hongbo Li3, Huan Liu1,2, Bing Chen1,2, Yan Liu1,2, Xiao Yu1,2, Genquan Han1,2 (1. Faculty of Integrated Circuit, Xidian Univ. (China), 2. Hangzhou Inst. of Tech., Xidian Univ. (China), 3. China Resources Microelectronics Ltd. (China))
