[SO-PS-03] Heterogeneous and 3D Integration / Interconnect / MEMS

1:32 PM - 1:34 PM JST(4:32 AM - 4:34 AM UTC)

[SO-PS-03-02] Controlling Glass Microchannel Surface Morphology via Atmospheric Pressure Plasma Surface Modification and HCl Etching

〇Nobuya Mineyuki¹, Yasuo Hayashi², Seiichiro Higashi¹ (1. Hiroshima Univ. (Japan), 2. AGC Inc. (Japan))

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