[SO-PS-04] Area 4 Short Presentation

1:58 PM - 2:00 PM JST(4:58 AM - 5:00 AM UTC)

[SO-PS-04-15] High-Performance Insulating Epitaxy on Secondary n-SiC Substrates for RF Applications

〇Tsung Ming Chao¹, Hsia yu Chen¹, Lung Hsing Hsu², Yu Yun Lin³, J Andrew Yeh¹ (1. National Tsing Hua University (Taiwan), 2. Taiwan Semiconductor Research Institute (TSRI) (Taiwan), 3. National Cheng Kung University (Taiwan))