[SO-PS-05] Photonics: Devices / Integration / Related Technology

1:50 PM - 1:52 PM JST(4:50 AM - 4:52 AM UTC)

[SO-PS-05-11] Substrate Orientation-Dependent Oxygen Incorporation and Superconductivity in thin NbN Films deposited by Reactive Sputtering

〇WEI CHANG^1,2, Yu-Ting Lin², Ping-Feng Chi², Sheng-Tien Lin¹, Wen-Hao Chang², Ming-Jye Wang², Jing-Jie Wang¹, Jing-Wen Zhang¹, Yung-Lan Chuang¹, Tung-Sen Lin¹, Ming-Lun Lee³, Jinn-Kong Sheu¹ (1. National Cheng Kung Univ. (Taiwan), 2. Academia Sinica (Taiwan), 3. Southern Taiwan Univ. of Science and Technology (Taiwan))