[SO-PS-10] 10: Thin Film Electronics: Oxide / Non‐single Crystalline / Novel Process

1:38 PM - 1:40 PM JST(4:38 AM - 4:40 AM UTC)

[SO-PS-10-05] Fabrication of α-quartz-type GeO₂ thin filmsby water-vapor oxidation

〇Busaya Sonjaiyout¹, Mikio William Yoshioka-Hunter¹, Masaru Susa¹, Masao Kamiko², Kentaro Kyuno¹ (1. Shibaura Inst. of Technology (Japan), 2. The Univ. of Tokyo (Japan))