[SO-PS-10] 10: Thin Film Electronics: Oxide / Non‐single Crystalline / Novel Process

1:46 PM - 1:48 PM JST(4:46 AM - 4:48 AM UTC)

[SO-PS-10-09] Thermally Stable IGO Thin Films Grown by Supercycle ALD Using Novel In and Ga Precursors with Identical Amidinate Ligand Structures

〇Jun Yong Lee^1,2, Dahui Jeon^1,2, Minsuk Sung^2,3, Changbong Yeon⁴, Jaesun Jung⁴, In-Hwan Baek^1,2 (1. The Univ. of Inha (Korea), 2. The Univ. of Inha IPCC (Korea), 3. Tanhay Inc. (Korea), 4. Soulbrain Co., Ltd. (Korea))