[23p-12E-1~13] 6.2 カーボン系薄膜

13:30 〜 13:45英語発表

[23p-12E-1] Effect of seed density on the morphology of polycrystalline diamond films

〇David VazquezCortes¹, Stoffel Janssens¹, Eliot Fried¹ (1.OIST)

キーワード：

polycrystalline diamond、seed density、film morphology

We investigate the effect of varying seed density on the morphology of polycrystalline diamond films. We prepared four samples with seed densities of 2.5 x10⁸ cm^-2, 2.0 x10⁹ cm^-2, 1.4 x10¹⁰ cm^-2, and 3.0 x10¹⁰ cm-2. We observe that under identical deposition conditions, the grain size increases and film texture shifts from (1 1 1)-oriented facets to (1 0 0)-oriented facets as seed density decreases. The results are corroborated by Raman spectroscopy and X-ray diffraction. Cross-section analysis of the samples evidences a change in deposition rate as seed density decreases. We propose that the portions of the silicon substrate not covered with diamond serve as a source of diamond precursors for the diamond particles. The excess of precursors provided by the silicon substrate promotes the increase in deposition rate and the change in film texture.