講演情報

[24a-12K-7]Effect of growth temperature on photoresponsivity of BaSi2 formed on a-SiC/TiN/SiO2

〇(D)Rui Du1, Takenaka Haruki1, Takumi Sato1, Yoichiro Koda2, Masami Mesuda2, Kaoru Toko1, Takashi Suemasu1 (1.Univ. of Tsukuba, 2.Tosoh Corp.)

キーワード:

BaSi2、photoresponsivity、temperature