講演情報
[24p-12M-8]Optimization of i-a-Si:H passivation process by DC facing target sputtering deposition
〇(D)Shasha Li1, Shinsuke Miyajima1 (1.Tokyo Tech)
キーワード：
amorphous silicon、surface passivation、sputtering
amorphous silicon、surface passivation、sputtering