講演情報
[24p-P02-2]Diamond MEMS resonators for real time dual sensing of magnetic fields
and temperatures up to 300℃
〇廖 梅勇1、Zhang Zilong1、Gu Keyun1、Chen Guo1、Sang Liwen1、小泉 聡1、小出 康夫1 (1.物質研)
キーワード：
単結晶ダイヤモンド,MEMS,デュアルセンサー
In the present work, we demonstrate the dual functional sensor s for magnetic fields and temperatures up to 300 by using different SCD MEMS resonators integrated with a FeGa/ Ti film and a WC/Ti fi l m separately The multifunctional sensor s can achieve high reliability temperatures mo nitoring and magnetic sensing at 300℃ The present multifunctional sensor offers a promising solution for developing high performance multifunctional sensors capable of magnetic sensing and temperature
monitoring under harsh environments.
monitoring under harsh environments.