[24p-P16-1~41] 21 合同セッションＫ「ワイドギャップ酸化物半導体材料・デバイス」（ポスター）

英語発表

[24p-P16-1] Solution-dependent electrostatic spray deposition for ZnO growth processes

〇(DC)Fysol Ibna^1,2,3,4, Keisuke Tomono¹, Keito Okubo¹, Kohta Hori¹, Mutsumi Sugiyama^1,5 (1.Tokyo Univ. Science, 2.Univ. of Dhaka, 3.BRAC Univ., 4.CITY Univ., 5.RIST, TUS)

キーワード：

electrostatic spray deposition、ZnO

This study concentrated on electrostatic spray deposition (ESD), a low-cost and simple deposition process that sprays a solution between a nozzle and a substrate to form ZnO thin films by thermal breakdown. There are several reports on ZnO growth mechanisms. ESD aims to achieve cost-effective and simplified thin film and device fabrication. However, solvent effects on the ZnO crystal mechanism in ESD deposition have not been studied. This study evaluated how solvent characteristics affect spray conditions and ZnO thin film qualities in ESD.