Presentation Information

[[PB]-3am-91]The synthesized of tellurium-containing polymers by ring-opening polyaddition reaction of tellurium tetrachloride and cyclic ethers and their application to resist materials.

○RYOSUKE TAGUCHI1, HIROTO KUDO1 (1. Grad. Sch. of Sci. and Eng. Kansai Univ.)

Keywords:

Organic-inorganic hybrid polymer,Tellurium,Resist materials,Ring-opening polyaddition reaction