Presentation Information

[A1433-1am-05]Thin film synthesis of Zr-type metal–organic framework using mist chemical vapor deposition

○Ryo Nakayama1, Sho Aoshima1, Tomohito Sudare1, Taro Hitosugi1 (1. The University of Tokyo)

Keywords:

Metal-organic framework,Film,Mist chemical vapor deposition