Presentation Information
[P2-2pm-02]Analysis of PTFE Particle Adhesion on Fluoroalkyl Chain-Modified Silicon Wafer Surfaces
○Yuta Semba1, Yao Li2, Akihide Hibara1 (1. Institute of Science Tokyo, 2. Institute of Multidisciplinary Research for Advanced Materials, Tohoku University)
Keywords:
PTFE,Fluoroalkyl Chain,Surface Free Energy