[P3-1vn] Poster

JapaneseP3. New materials/Materials

[P3-1vn-28] Development and Application of a Silicon Film Chamber Aimed at Improving X-ray Analytical Accuracy

○Tsuyoshi Yoda¹, Kazuhiko Yokohama¹ (1. Aomori Prefectural Industrial Technology Research Center)

Keywords:

silicon film,X-ray diffraction measurements,X-ray analytic microscopy