[FA] Focus Session A ~ Functional Thin Films for AI applications

10:00 AM - 10:20 AM JST(1:00 AM - 1:20 AM UTC)

[FA-03] C–V characteristics of ferroelectric Hf_1-xZr_xO₂: Impact of voltage sweep speed

*Hiroyuki Matsukawa¹, Mitsuru takenaka¹, Shinichi Takagi^1,2, Kasidit Toprasertpong¹ (1. U. Tokyo, School of Eng. (Japan), 2. Teikyo University (Japan))

Keywords:

HZO,HfZrO2,Ferroelectric,C-V measurement