The 85th JSAP Autumn Meeting 2024
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Session Details

Oral presentation8 Plasma Electronics : 8.3 Plasma nanotechnology

[19a-A36-1~7]8.3 Plasma nanotechnology

Thu. Sep 19, 2024 9:00 AM - 11:00 AM JST
Thu. Sep 19, 2024 12:00 AM - 2:00 AM UTC
A36 (TOKI MESSE 3F)
Kenji Ishikawa(Nagoya Univ.), Giichiro Uchida(Meijo Univ)
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9:00 AM - 9:15 AM JST(12:00 AM - 12:15 AM UTC)

[19a-A36-1]Low-temperature growth at 225 °C and characterization of carbon nanowalls synthesized by radical injection plasma-enhanced chemical vapor deposition

Quang Minh Ngo1, Van Nong Ngo2, Osamu Oda2, 〇Kenji Ishikawa2, Masaru Hori2 (1.Nagoya Univ., 2.Nagoya Plasma)
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9:15 AM - 9:30 AM JST(12:15 AM - 12:30 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[19a-A36-2]Contribution of deposition characteristics of carbon nanoparticles to stress reduction by inserting carbon nanoparticles into amorphous carbon films

〇(D)Shinjiro Ono1, Manato Eri1, Takamasa Okumura1, Naoto Yamashita1, Kunihiro Kamataki1, Haruki Kiyama1, Naho Itagaki1, Kazunori Koga1, Masaharu Shiratani1 (1.Kyushu Univ.)
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9:30 AM - 9:45 AM JST(12:30 AM - 12:45 AM UTC)

[19a-A36-3]Machine Learning Prediction of SiO2 Film Property from Optical Emission Spectroscopy in TEOS /O2/Ar Plasma CVD

〇KUNIHIRO KAMATAKI1, Sukma Fitriani2, Yushi Sato1, Yuma Yamamoto1, Yousei Kurosaki1, Daisuke Yamashita1, Naoto Yamashita1, Takamasa Okumura1, Naho Itagaki1, Kazunori Koga1, Masaharu Shiratani1 (1.Kyushu Univ. ISEE., 2.Kyushu Univ. IMI.)
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9:45 AM - 10:00 AM JST(12:45 AM - 1:00 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[19a-A36-4]Effect of post-annealing treatment on silicon nanocone structure induced by hydrogen plasma

〇Ken Sakamoto1, Hiroaki Kakiuchi1, Hiromasa Ohmi1 (1.Osaka Univ.)
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10:15 AM - 10:30 AM JST(1:15 AM - 1:30 AM UTC)

[19a-A36-5]Stabilization of SEI layer by Ge/LiAlGePO composites and improvement of anode performance in Li-ion batteries

〇Tomoki Omae1, Daiki Fujikake1, Masayuki Ishihara1, Tomohisa Nakada1, Ryoto Niwa1, Reon Yokoi1, Giichiro Uchida1 (1.Meijo Univ.)
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10:30 AM - 10:45 AM JST(1:30 AM - 1:45 AM UTC)

[19a-A36-6]Ge addition to Si nanowires in the co-sputtering process and application to Li-ion battery anode

〇Tatsuo Ueda1, Tomoki Omae1, Daiki Fujikake1, Keigo Terada1, Yoshiyuki Hasegawa1, Ryosuke Yamazaki1, Ryuta Murase1, Giichiro Uchida1 (1.Meijo Univ.)
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10:45 AM - 11:00 AM JST(1:45 AM - 2:00 AM UTC)

[19a-A36-7]Particle Size Control of Ni, Fe-Doped Si Nanoparticle Films and
Their Application to High-Capacity Li Ion Battery Anodes

〇Ryosuke Yamazaki1, Ueda Tatsuo1, Terada Keigo1, Hasegawa Yoshiyuki1, Fujikake Daiki1, Murase Ryuta1, Yokoi Reon1, Uchida Giichiro1 (1.Meijo Univ.)
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