The 85th JSAP Autumn Meeting 2024

13 Semiconductors : 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Oral presentation

[16a-B1-1~11]13.4 Si processing /Si based thin film / MEMS / Equipment technology

Mon. Sep 16, 2024 9:00 AM - 12:00 PM JST
Mon. Sep 16, 2024 12:00 AM - 3:00 AM UTC

B1 (Exhibition Hall B)

Tatsuya Okada(Univ. of the Ryukyus), Yan Wu(Tokyo Inst. of Tech.)

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Oral presentation

[16p-B1-1~14]13.4 Si processing /Si based thin film / MEMS / Equipment technology

Mon. Sep 16, 2024 1:00 PM - 5:00 PM JST
Mon. Sep 16, 2024 4:00 AM - 8:00 AM UTC

B1 (Exhibition Hall B)

Wenchang Yeh(Shimane Univ.), Tatsuya Okada(Univ. of the Ryukyus), Naoya Okada(AIST)

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Oral presentation

[17a-B1-1~7]13.4 Si processing /Si based thin film / MEMS / Equipment technology

Tue. Sep 17, 2024 9:00 AM - 11:00 AM JST
Tue. Sep 17, 2024 12:00 AM - 2:00 AM UTC

B1 (Exhibition Hall B)

Fumito Imura(Hundred Semiconductors Inc.), Yan Wu(Tokyo Inst. of Tech.)

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Poster presentation

[17p-P05-1~1]13.4 Si processing /Si based thin film / MEMS / Equipment technology

Tue. Sep 17, 2024 4:00 PM - 6:00 PM JST
Tue. Sep 17, 2024 7:00 AM - 9:00 AM UTC

P05 (Exhibition Hall A)

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