The 86th JSAP Autumn Meeting 2025

13 Semiconductors : 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Oral presentation

[8a-N324-1~11]13.4 Si processing /Si based thin film / MEMS / Equipment technology

Mon. Sep 8, 2025 9:00 AM - 12:00 PM JST
Mon. Sep 8, 2025 12:00 AM - 3:00 AM UTC

N324 (Lecture Hall North)

Seiichiro Higashi(Hiroshima Univ.), Reo Kometani(Univ. of Tokyo)

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Oral presentation

[8p-N324-1~13]13.4 Si processing /Si based thin film / MEMS / Equipment technology

Mon. Sep 8, 2025 1:30 PM - 5:00 PM JST
Mon. Sep 8, 2025 4:30 AM - 8:00 AM UTC

N324 (Lecture Hall North)

Tatsuya Okada(Univ. of the Ryukyus), Naoya Okada(AIST)

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Poster presentation

[9a-P06-1~3]13.4 Si processing /Si based thin film / MEMS / Equipment technology

Tue. Sep 9, 2025 9:30 AM - 11:30 AM JST
Tue. Sep 9, 2025 12:30 AM - 2:30 AM UTC

P06 (Gymnasium)

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