[8a-N324-1~11]13.4 Si processing /Si based thin film / MEMS / Equipment technology
Mon. Sep 8, 2025 9:00 AM - 12:00 PM JST
Mon. Sep 8, 2025 12:00 AM - 3:00 AM UTC
Mon. Sep 8, 2025 12:00 AM - 3:00 AM UTC
N324 (Lecture Hall North)
Seiichiro Higashi(Hiroshima Univ.), Reo Kometani(Univ. of Tokyo)