Poster presentation[7p-P01-1~15]8.2 Plasma deposition of thin film, plasma etching and surface treatmentSun. Sep 7, 2025 1:30 PM - 3:30 PM JSTSun. Sep 7, 2025 4:30 AM - 6:30 AM UTCP01 (Gymnasium)Download PDF
Oral presentation[9p-N324-1~19]8.2 Plasma deposition of thin film, plasma etching and surface treatmentTue. Sep 9, 2025 1:30 PM - 6:30 PM JSTTue. Sep 9, 2025 4:30 AM - 9:30 AM UTCN324 (Lecture Hall North)Akihisa Ogino(Shizuoka Univ.), Inoue Kenichi(名大)Download PDFZoom
Oral presentation[10p-N324-1~12]8.2 Plasma deposition of thin film, plasma etching and surface treatmentWed. Sep 10, 2025 1:30 PM - 4:45 PM JSTWed. Sep 10, 2025 4:30 AM - 7:45 AM UTCN324 (Lecture Hall North)Keigo Takeda(Meijo Univ.), Toshiyuki Sasaki(Kioxia)Download PDFZoom