[14a-K201-1~7] 8.3 Plasma nanotechnology

9:00 AM - 9:15 AM JST(12:00 AM - 12:15 AM UTC)

[14a-K201-1] Mass spectrometry of ammonia borane contained Ar plasma for h-BN film formation

〇Takeshi Kitajima¹, Reiji Kawasaki¹, Toshiki Nakano¹ (1.Nat. Def. Acad.)

Keywords:

plasma,2D materials,dielectric films

Ammonia borane is used as a relatively easy-to-handle BN source to rapidly synthesize h-BN, an important insulating material in the field of two-dimensional electronics. Ammonia borane plasma has attracted attention for the purpose of rapid film formation, and analysis of active species in the plasma is required. Here, we performed mass spectrometry analysis of active species generated from ammonia borane powder irradiated with Ar plasma.