The 72nd JSAP Spring Meeting 2025
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Session Details

Oral presentation8 Plasma Electronics : 8.3 Plasma nanotechnology

[14a-K201-1~7]8.3 Plasma nanotechnology

Fri. Mar 14, 2025 9:00 AM - 10:45 AM JST
Fri. Mar 14, 2025 12:00 AM - 1:45 AM UTC
K201 (Lecture Hall Bldg.)
Akimitsu Hatta(Kochi Univ. of Tech.)
9:00 AM - 9:15 AM JST(12:00 AM - 12:15 AM UTC)

[14a-K201-1]Mass spectrometry of ammonia borane contained Ar plasma for h-BN film formation

〇Takeshi Kitajima1, Reiji Kawasaki1, Toshiki Nakano1 (1.Nat. Def. Acad.)
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9:15 AM - 9:30 AM JST(12:15 AM - 12:30 AM UTC)

[14a-K201-2]Relationship between electron density and gas-phase species in plasma for
isocyanate group functionalization on Multi-walled Carbon Nanotubes

〇(M1)Kakuto Watanabe1, Keiji Nakamura1, Daisuke Ogawa1 (1.Chubu Univ.)
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9:30 AM - 9:45 AM JST(12:30 AM - 12:45 AM UTC)

[14a-K201-3]Gas-Liquid Interfacial Plasma Generation inside a Microfluidic Plate

〇Hiroyuki Yoshiki1, Akihiro Enta2 (1.Sendai College, 2.Tsuruoka College)
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9:45 AM - 10:00 AM JST(12:45 AM - 1:00 AM UTC)

[14a-K201-4]Study on decomposition and removal of fine particles in incense smoke using rotary electrode dielectric barrier discharge with addition of argon gas

〇(B)Taiga Uramaru1, Hironao Iwasaki1, Yoon Myat Aung1, Yin New Nyein1, Mitsuhiko Hata1, Yasunori Tanaka1, Yusuke Nakano1, Tatsuo Ishijima1 (1.Kanazawa Univ.)
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10:00 AM - 10:15 AM JST(1:00 AM - 1:15 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[14a-K201-5]Analysis of optimization trends in plasma etching recipe using machine learning model trained by D-optimal design-based dataset

〇Ryo Morisaki1, Takeshi Ohmori1, Yasuhide Mori1, Naoto Takano2, Ryoji Asakura2 (1.Hitachi, Ltd., 2.Hitachi High-tech)
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10:15 AM - 10:30 AM JST(1:15 AM - 1:30 AM UTC)English Presentation

[14a-K201-6]Ripple structure formation on GaAs using Ar plasma irradiation

〇(PC)Quan Shi1, Shin Kajita1, Noriyasu Ohno2 (1.Univ. Tokyo, 2.Nagoya Univ.)
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10:30 AM - 10:45 AM JST(1:30 AM - 1:45 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[14a-K201-7]Reduction of Dysprosium Oxide by Microwave Plasma

〇Hanae Yoshida1, Satoshi Fujii1, Yukiko Takahashi2 (1.NIT,Okinawa Collage, 2.NIMS)
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