[14a-K306-1~10] 15.7 Crystal characterization, impurities and crystal defects

9:00 AM - 9:15 AM JST(12:00 AM - 12:15 AM UTC)

[14a-K306-1] Metallic impurities gettering behavior of Hydrocarbon Molecular Ion Implantation Epitaxial Silicon Wafer during the pn-junction diode fabrication process

〇Sho Nagatomo¹, Takeshi Kadono¹, Ryo Hirose¹, Koji Kobayashi¹, Shun Sasaki¹, Kazunari Kurita¹ (1.SUMCO CORPORATION)

Keywords:

gettering,Molecular Ion Implantation,pn-junction