[14a-K401-1~9] 15.4 III-V-group nitride crystals

9:45 AM - 10:00 AM JST(12:45 AM - 1:00 AM UTC)

[14a-K401-4] Crystal Truncation Rod Scattering in X-ray Nanobeam Diffraction of GaN Nanowires and GaN-based Multi-quantum Shells and its Application to Structural Analysis

〇Takao Miyajima¹, Shoya Ota¹, Ryota Kobayashi¹, Tsurugi Kondo¹, Kazushi Sumitani², Yasuhiro Imai², Shigeru Kimura², Nobuhiro Yasuda², Tomoyo Nakao³, Shigeo Arai³, Satoshi Kamiyama¹, Daichi Imai¹ (1.Meijo Univ., 2.JASRI, 3.Nagoya Univ.)

Keywords:

Quantum Shells,X-ray Nanobeam,Crystal Truncation Rod Scattering

We have reported that non-destructive structural analysis of GaN-based multi-quantum shells, which are expected to be used as the active layer of GaN-based high-power semiconductor lasers, is possible by using X-ray nanobeam diffraction at the large synchrotron radiation facility SPring-8. In this study, we found that when the side wall of GaN NWs or GaN-based MQSs is irradiated with an X-ray nanobeam, very clear crystal truncation rod (CTR) scattering is observed in the reciprocal lattice map. In this presentation, we will report on the characteristics of the CTR scattering observed here and the structural analysis using this.