[14p-K210-1~9] 13.2 Exploratory Materials, Physical Properties, Devices

2:00 PM - 2:15 PM JST(5:00 AM - 5:15 AM UTC)

[14p-K210-3] Effectiveness of BaSi₂ thermal evaporation using a machine learning model and MgO barrier layer

Takaharu Nakanishi¹, Ryuto Ueda¹, Junji Yamanaka¹, Keisuke Arimoto¹, 〇Kosuke Hara¹ (1.Univ. Yamanashi)

Keywords:

Solar cell material,Thermal evaporation,Machine learning

BaSi₂ is a promising material for high-efficiency solar cells, but composition control during thermal evaporation remains a challenge. In this study, we used machine-learning-predicted process conditions to achieve single-phase BaSi₂ deposition on an MgO barrier layer. XRD and SEM analyses at deposition temperatures of 450–500 °C confirmed the effectiveness of MgO as a barrier and the successful formation of BaSi₂.