Presentation Information
[14p-K503-6]Effects of ultra-fast cooling in millisecond timescale on electrical properties of ferroelectric Al:HfO2 thin films
〇Yusuke Tani1, Tomoya Mifune2, Hideaki Tanimura1,2, Yuma Ueno1, Hironori Fujisawa2, Seiji Nakashima2, Ai Osaka2, Shinichi Kato1, Takumi Mikawa1 (1.SCREEN Semiconductor Solutions, 2.University of Hyogo)
Keywords:
Ferroelectric,Flash Lamp Anneal
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