[14p-K503-1~17] CS.3 Code-sharing Session of 6.1 & 13.3 & 13.5

2:30 PM - 2:45 PM JST(5:30 AM - 5:45 AM UTC)

[14p-K503-6] Effects of ultra-fast cooling in millisecond timescale on electrical properties of ferroelectric Al:HfO₂ thin films

〇Yusuke Tani¹, Tomoya Mifune², Hideaki Tanimura^1,2, Yuma Ueno¹, Hironori Fujisawa², Seiji Nakashima², Ai Osaka², Shinichi Kato¹, Takumi Mikawa¹ (1.SCREEN Semiconductor Solutions, 2.University of Hyogo)

Keywords:

Ferroelectric,Flash Lamp Anneal