[14p-K503-1~17] CS.3 Code-sharing Session of 6.1 & 13.3 & 13.5

3:30 PM - 3:45 PM JST(6:30 AM - 6:45 AM UTC)

[14p-K503-9] Thickness dependence of Ec in ferroelectric HfO₂ (iii)
- Comparison of Ec between orthorhombic and rhombohedral phases -

〇Akira Toriumi¹, Shinji Migita² (1.None, 2.AIST)

Keywords:

ferroelectric HfO2,Coercive field,Thickness dependence

Thickness dependence of Ec and XRD pattern in both o-phase and r-phase ferroelectric HfO2 is discussed.