Presentation Information
[14p-P03-18]Study of Annealing Effects on SiO2 Films Formed by Atomic-Species-Enhanced Chemical Vapor Deposition
〇Hideaki Yamamoto1, Sogo Shikata1, Masakazu Furukawa2, Akihiro Wakahara1, Hiroshi Okada1 (1.Toyohashi Univ. Tech., 2.Aries Research Limited Company)
Keywords:
GaN,Silicon-based insulating film,Chemical Vapor Deposition
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