[14p-P10-1~25] Symposium on Research and Human-Capital Development Activities aimed at Creating Next-Generation Semiconductors Industry

[14p-P10-2] Fabrication and Sensing Characterization of Potentiometric CMOS Odor Sensor

〇Kaito Yotsugi¹, Kaori Kako¹, Naoko Inada¹, Yong-Joon Choi¹, Kazuhiro Takahashi¹, Kazuaki Sawada¹, Toshihiko Noda¹ (1.Toyohashi Tech.)

Keywords:

odor sensor,CMOS sensor,odor membrane

In this study, a new sensing system that mimics human olfaction was developed by fabricating a potentiometric CMOS odor sensor and evaluating its sensing characteristics. Thirty types of odor-sensitive films were deposited on a 256×256-pixel sensor chip, and the potential changes caused by odor molecules were recorded in real time. Odors from items such as juice and coffee were measured, and unique response patterns corresponding to different odors were observed. In the future, using the collected data to construct a machine learning model is expected to enable more accurate odor identification.