[15a-K310-1~8] 15.5 Group IV crystals and alloys

10:30 AM - 10:45 AM JST(1:30 AM - 1:45 AM UTC)English Presentation

[15a-K310-3] Effect of Plasma in Molecular Beam Deposited Germanium-Sulfur Thin Films

〇(DC)Ahmed Mahmoud^1,2, Ryo Matsumura¹, Naoki Fukata^1,2 (1.NIMS-MANA, 2.Univ. of Tsukuba)

Keywords:

Germanium Sulfide,Molecular-beam Deposition,Plasma

This presentation showacases the effect of the RF plasma power on the thickness, composition and bonding in molecular-beam deposited germanium sulfide thin films.