[15a-K310-1~8] 15.5 IV族結晶，IV-IV族混晶

10:30 〜 10:45英語発表

[15a-K310-3] Effect of Plasma in Molecular Beam Deposited Germanium-Sulfur Thin Films

〇(DC)Ahmed Mahmoud^1,2, Ryo Matsumura¹, Naoki Fukata^1,2 (1.NIMS-MANA, 2.Univ. of Tsukuba)

キーワード：

Germanium Sulfide、Molecular-beam Deposition、Plasma

This presentation showacases the effect of the RF plasma power on the thickness, composition and bonding in molecular-beam deposited germanium sulfide thin films.