[15a-K401-1~8] 15.4 III-V-group nitride crystals

9:00 AM - 9:15 AM JST(12:00 AM - 12:15 AM UTC)

[15a-K401-1] Investigation on sputtering degenerate n⁺-GaN (d-GaN) ohmic contacts
for AlGaN/GaN HEMTs

〇Kaito Fujisawa¹, Kohei Ueno¹, Hiroshi Fujioka¹ (1.IIS)

Keywords:

degenerate,ohmic contact,gan hemt