[15a-K401-1~8] 15.4 III-V-group nitride crystals

9:15 AM - 9:30 AM JST(12:15 AM - 12:30 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[15a-K401-2] Development of sputtering Al-rich AlGaN multi-channel nanowire transistor with n⁺⁺Al-rich AlGaN ohmic contacts

〇Takao Kozaka¹, Kohei Ueno¹, Hiroshi Fujioka¹ (1.IIS)

Keywords:

AlN,transistor,sputtering