[15a-K403-1~12] 13.7 Compound and power devices, process technology and characterization

12:15 PM - 12:45 PM JST(3:15 AM - 3:45 AM UTC)English Presentation

[15a-K403-12] [The 46th Paper Award Speech] Vertical β-Ga2O3 Schottky Barrier Diodes With Trench Staircase Field Plate

〇Sandeep Kumar¹, Hisashi Murakami², Yoshinao Kumagai², Masataka Higashiwaki³ (1.NICT, 2.Tokyo Univ. of Agriculture and Technology, 3.Osaka Metropolitan Univ.)

Keywords:

Gallium oxide,Schottky barrier diode