[15a-K403-1~12] 13.7 化合物及びパワーデバイス・プロセス技術・評価

12:15 〜 12:45英語発表

[15a-K403-12] [The 46th Paper Award Speech] Vertical β-Ga2O3 Schottky Barrier Diodes With Trench Staircase Field Plate

〇Sandeep Kumar¹, Hisashi Murakami², Yoshinao Kumagai², Masataka Higashiwaki³ (1.NICT, 2.Tokyo Univ. of Agriculture and Technology, 3.Osaka Metropolitan Univ.)

キーワード：

Gallium oxide、Schottky barrier diode