[15a-K507-1~8] 7.2 Applications and technologies of electron beams

9:15 AM - 9:30 AM JST(12:15 AM - 12:30 AM UTC)

[15a-K507-2] Physical Information in Low Energy Backscattered Electron Image

〇Takashi Sekiguchi¹, Yuanzhao Yao¹, Kouya Matsuishi¹, Yuto yanagihara² (1.Univ. Tsukuba, 2.GPI)

Keywords:

back scattered electron,microchannel plate,scanning electron microscope

We are developing high-pass backscattered electron (BSE) detector in scanning electron microscope. This detector is composed of microchannel plate and bias grids. High-pass BSE images are recorded using this detector. Energy filtered BSE images are obtained by subtracting these images. We discuss the physical information in these BSE images, especially low energy BSE image.