The 72nd JSAP Spring Meeting 2025
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Session Details

Oral presentation7 Beam Technology and Nanofabrication : 7.2 Applications and technologies of electron beams

[15a-K507-1~8]7.2 Applications and technologies of electron beams

Sat. Mar 15, 2025 9:00 AM - 11:15 AM JST
Sat. Mar 15, 2025 12:00 AM - 2:15 AM UTC
K507 (Lecture Hall Bldg.)
Takafumi Ishida(Nagoya University)
9:00 AM - 9:15 AM JST(12:00 AM - 12:15 AM UTC)

[15a-K507-1][The 57th Young Scientist Presentation Award Speech] Performance of single-electron detection with an SOI pixel detector and its application to electron beam interference experiments

〇Yuichi Ishida1, Takafumi Ishida1,2, Makoto Kuwahara1,2, Yasuo Arai3, Koh Saitoh1,2 (1.Grad. Sch. of Eng., Nagoya Univ., 2.IMaSS, 3.KEK)
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9:15 AM - 9:30 AM JST(12:15 AM - 12:30 AM UTC)

[15a-K507-2]Physical Information in Low Energy Backscattered Electron Image

〇Takashi Sekiguchi1, Yuanzhao Yao1, Kouya Matsuishi1, Yuto yanagihara2 (1.Univ. Tsukuba, 2.GPI)
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9:30 AM - 9:45 AM JST(12:30 AM - 12:45 AM UTC)

[15a-K507-3]Edge effect correction for Electron Beam Size Estimation in Scanning Electron Microscopy

〇Yasunari Sohda1, Daichi Tokura1, Yuki Soshi1 (1.Univ. of Tsukuba)
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9:45 AM - 10:00 AM JST(12:45 AM - 1:00 AM UTC)

[15a-K507-4]Virtual Source Size Measurement of NEA Photocathode by Knife-edge Method.

〇Daichi A Takane1, Hideo Morishita1, Takashi Ohshima2, Yoichi Ose2, Tsutomu Saito2, Toshihide Agemura2, Makoto Kuwahara3 (1.Hitachi, Ltd., 2.Hitachi High-Tech Corp., 3.Nagoya Univ.)
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10:15 AM - 10:30 AM JST(1:15 AM - 1:30 AM UTC)

[15a-K507-5]Development of high-speed recordable direct electron detectors using SOI technology Ⅱ

〇Yuichi Ishida1, Takafumi Ishida1,2, Makoto Kuwahara1,2, Yasuo Arai3, Koh Saitoh1,2 (1.Grad. Sch. of Eng., Nagoya Univ., 2.IMaSS, 3.KEK)
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10:30 AM - 10:45 AM JST(1:30 AM - 1:45 AM UTC)

[15a-K507-6]Secondary electron detectors for low vacuum SEM (comparison of UVD and ET detectors)

〇Yuanzhao Yao1, Ryosuke Sonoda1, Yasunari Sohda1, Takashi Sekiguchi1 (1.Tsukuba Univ.)
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10:45 AM - 11:00 AM JST(1:45 AM - 2:00 AM UTC)

[15a-K507-7]Backscattered Electron Detector Using Microchannel Plate

〇Yuto Yanagihara1, Yuanzhao Yao2, Hayata Yamamoto2, Takashi Sekiguchi2 (1.GPI, 2.Univ. of Tsukuba)
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11:00 AM - 11:15 AM JST(2:00 AM - 2:15 AM UTC)

[15a-K507-8]Dependence of electron beam shift in double aperture lens analyzer

〇Yuki Hayashida1, Ryohei Tsuruta1, Yoichi Yamada1 (1.Tsukuba Univ.)
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